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1

The effects of laser annealing ambient and the number of laser shots on the morphology of poly-si films

Katsuyuki Suga, Mitsuru Chida, Akito Hara, Yasuyoshi Mishima, Nobuo Sasaki

Journal:

Electronics and Communications in Japan (Part II: Electronics))

Year:

2003

Language:

english

File:

PDF, 5.41 MB

english, 2003

2

Properties of a-Si:H prepared by the photochemical decomposition of Si2H6

Yasuyoshi Mishima, Yoshinori Ashida, Masataka Hirose

Journal:

Journal of Non-Crystalline Solids

Year:

1983

Language:

english

File:

PDF, 165 KB

english, 1983

3

Morphological fluctuations in discharge-produced μc-Si:H studied by small angle X-ray scattering

Seiichi Miyazaki, Yasuyoshi Mishima, Masataka Hirose, Yukio Osaka

Journal:

Journal of Non-Crystalline Solids

Year:

1983

Language:

english

File:

PDF, 158 KB

english, 1983

4

Strained-silicon formation on relaxed silicon–germanium/ silicon-on-insulator substrate using laser annealing

Mishima, Yasuyoshi, Ochimizu, Hirosato, Mimura, Atsushi

Journal:

Applied Physics Letters

Year:

2005

Language:

english

File:

PDF, 409 KB

english, 2005

5

Step doping in hydrogenated amorphous silicon thin-film transistors for threshold voltage shifts

Matsumoto, Tomotaka, Mishima, Yasuyoshi

Journal:

Journal of Applied Physics

Year:

1989

Language:

english

File:

PDF, 682 KB

english, 1989

6

Non-mass-separated ion shower doping of polycrystalline silicon

Mishima, Yasuyoshi, Takei, Michiko

Journal:

Journal of Applied Physics

Year:

1994

Language:

english

File:

PDF, 875 KB

english, 1994

7

P-3: The Effect of a Laser Annealing Ambient on the Morphology and TFT Performance of Poly-Si Films

Suga, Katsuyuki, Chida, Mitsuru, Mishima, Yasuyoshi, Hara, Akito, Sasaki, Nobuo

Journal:

SID Symposium Digest of Technical Papers

Year:

2000

Language:

english

File:

PDF, 646 KB

english, 2000

8

New Strained Silicon-on-Insulator Fabricated by Laser-Annealing Technology

Mishima, Yasuyoshi, Ochimizu, Hirohisa, Mimura, Atsushi

Journal:

Japanese Journal of Applied Physics

Year:

2005

Language:

english

File:

PDF, 168 KB

english, 2005

9

Silicon Thin-Film Formation by Direct Photochemical Decomposition of Disilane

Mishima, Yasuyoshi, Hirose, Masataka, Osaka, Yukio, Nagamine, Kunihiro, Ashida, Yoshinori, Kitagawa, Nobuhisa, Isogaya, Kazuyoshi

Journal:

Japanese Journal of Applied Physics

Year:

1983

Language:

english

File:

PDF, 301 KB

english, 1983

10

Influence on Hole and Electron Mobilities of Using a Multi-Wall Structural Channel Metal–Oxide–Semiconductor Field-Effect Transistors

Mishima, Yasuyoshi, Shido, Hideharu, Fukuda, Masatoshi

Journal:

Japanese Journal of Applied Physics

Year:

2007

Language:

english

File:

PDF, 371 KB

english, 2007

11

Nucleation of Microcrystallites in Phosphorus-Doped Si:H Films

Mishima, Yasuyoshi, Hamasaki, Toshihiko, Kurata, Hiroyuki, Hirose, Masataka, Osaka, Yukio

Journal:

Japanese Journal of Applied Physics

Year:

1981

Language:

english

File:

PDF, 237 KB

english, 1981

12

Multi-Wall Channel Transistor for P-type Metal Oxide Semiconductor Field-Effect Transistor Performance Improvement

Shido, Hideharu, Fukuda, Masatoshi, Mishima, Yasuyoshi

Journal:

Japanese Journal of Applied Physics

Year:

2006

Language:

english

File:

PDF, 466 KB

english, 2006

13

Analysis of Drivability Enhancement Factors in Nanograting Metal–Oxide–Semiconductor Field-Effect Transistors

Zhu, Xiaoli, Kuroki, Shin-Ichiro, Kotani, Koji, Fukuda, Masatoshi, Shido, Hideharu, Mishima, Yasuyoshi, Ito, Takashi

Journal:

Japanese Journal of Applied Physics

Year:

2008

Language:

english

File:

PDF, 256 KB

english, 2008

14

SPIE Proceedings [SPIE Microelectronic Manufacturing '99 - Santa Clara, CA (Wednesday 22 September 1999)] Microelectronic Device Technology III - Influence of laser annealing conditions on the performance of 0.6-μm polysilicon TFTs

Chida, Mitsuru, Burnett, David, Tsuchiya, Toshiaki, Suga, Katsuyuki, Mishima, Yasuyoshi, Sasaki, Nobuo

Year:

1999

Language:

english

File:

PDF, 1.19 MB

english, 1999

15

14-3: High-Performance Organic-TFT Circuits Fabricated by All-Printing Technology on Flexible Plastic Substrates

Mishima, Yasuyoshi, Akiyama, Masahiko, Hashimoto, Katsuyoshi, Watanabe, Naoki, Kamata, Toshihide

Journal:

SID Symposium Digest of Technical Papers

Year:

2017

Language:

english

File:

PDF, 601 KB

english, 2017

16

10.5796/electrochemistry.81.468

GOTO, Takashi, HAYASHI, Masayuki, SUZUKI, Hideyuki, SAWAKI, Daigo, HAMANO, Mitsumasa, ICHIKI, Takahiko, NAKATANI, Toshihiro, IMAI, Shinji, IHAMA, Mikio, MISHIMA, Yasuyoshi

Journal:

Electrochemistry

Year:

2013

File:

PDF, 1.86 MB

2013

17

10.5796/electrochemistry.81.467

MISHIMA, Yasuyoshi

Journal:

Electrochemistry

Year:

2013

File:

PDF, 201 KB

2013

18

Internal Photoemission in a-Si:H Schottky-Barrier and MOS Structures

Yamamoto, Tomio, Mishima, Yasuyoshi, Hirose, Masataka, Osaka, Yukio

Journal:

Japanese Journal of Applied Physics

Year:

1981

File:

PDF, 470 KB

1981

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